The Omicron variable temperature STM (VT-STM) can heat samples to 500ºC while imaging. It has a differentially pumped MBE cell, argon ion source, LEED, Auger, quadrupole mass spectrometer, and angle resolved XPS (red arrow). This machine contains a UHV cryogenic scanning Kelvin probe force microscope (KPFM) and non-contact AFM (NC-AFM). UHV KPFM allows one to directly image very small amounts of charge on the surface. The machine is equipped with a HV ALD dosing chamber which enables us to take decapped semiconductor samples and dose the samples with metal and oxidant precursors without air exposure.